Spareparts
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- Chuck & Pedestal
- ESC & Chcuk
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715-800328-002D ESC Housing Bottom Plate [LAM]
715-800328-002D ESC Housing Bo.jpg)
16-132590-00N Rev E SHWRHD Pinned 300mm [Novellus]_Sold out
16-132590-00N Rev E SHWRHD Pin 16-132590-00N Rev E SHWRHD Pin.jpg)
02-292391-00 Pedestal 300mm [Novellus]
02-292391-00 Pedestal 300mm 02-292391-00 Pedestal 300mm